More Details

Contributors:

Institute of Electrical and Electronics Engineers

Semiconductor Equipment and Materials International

IEEE Electron Devices Society

IEEE Components, Hybrids, and Manufacturing Technology Society

Meetings:

IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop

Languages:

English

Language Notes:

Item content: English

Main Work:

ASMC... proceedings [IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop]

Alternate Titles:

ISSN key title: ASMC proceedings
Other title: Proceedings
Other title: IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop

Publication Frequency:

Annual

Subjects:

Semiconductors — Design and construction — Congresses

Semiconductor industry — Congresses

Semiconductors — Design and construction

Semiconductors

Semiconductor industry

Genres:

Conference papers and proceedings

General Notes:

Some issues have also a distinctive theme title.
Published: Mountain View, CA : SEMI, 1993-
Also available by subscription, in PDF format, via the World Wide Web.
Sponsored by: Semiconductor Equipment and Materials International, the IEEE Electron Devices Society, and the IEEE Components, Hybrids & Manufacturing Technology Society.

Physical Description:

volumes : illustrations ; 28 cm
1st ('90)-

Call Numbers:

TK7871.85 .I25a

ISSNs:

1078-8743

Library of Congress Control Numbers:

96643156
sn 94037111 (i.e., sn94037111) [Invalid]

OCLC Numbers:

1052981610
22962210 [Invalid]